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Publication:856629

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Display titleAn inverse heat transfer method to provide near-isothermal surface for disc heaters used in microlithography
Default sort key856629
Page length (in bytes)15
Namespace ID4206
NamespacePublication
Page ID8887606
Page content languageen - English
Page content modelwikitext
Indexing by robotsAllowed
Number of redirects to this page0
Counted as a content pageYes
MaRDI portal item IDQ856629
Central descriptionscientific article; zbMATH DE number 5078725

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Page creatorImport240129110113 (talk | contribs)
Date of page creation14:56, 30 January 2024
Latest editorImport240129110113 (talk | contribs)
Date of latest edit14:56, 30 January 2024
Total number of edits1
Recent number of edits (within past 90 days)0
Recent number of distinct authors0

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