Pages that link to "Item:Q3055360"
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The following pages link to Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework (Q3055360):
Displaying 3 items.
- Multiple-input dual-output adjustment scheme for semiconductor manufacturing processes using a dynamic dual-response approach (Q869631) (← links)
- Run-to-run control methods based on the DHOBE algorithm (Q1858368) (← links)
- A novel method for control performance assessment with fractional order signal processing and its application to semiconductor manufacturing (Q2287471) (← links)