Pages that link to "Item:Q4525587"
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The following pages link to Modelling, control and simulation of an IC wafer fabrication system: A generalized stochastic coloured timed Petri Net approach (Q4525587):
Displaying 3 items.
- Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing (Q1915979) (← links)
- Modelling and analysis of wafer fabrication scheduling via generalized stochastic Petri net and simulated annealing (Q4474691) (← links)
- Modelling and rescheduling of a re-entrant wafer fabrication line involving machine unreliability (Q4671328) (← links)