Thickness dependence of the mechanical properties of piezoelectric high-Q_m nanomechanical resonators made from aluminium nitride
DOI10.5281/zenodo.14638466Zenodo14638466MaRDI QIDQ6710808
Dataset published at Zenodo repository.
Witlef Wieczorek, Armin Dadgar, Jürgen Bläsing, Alexander Jung, Laurentius Radit Nindito, Andre Strittmatter, Anastasiia Ciers, Hannes Pfeifer, Joachim Ciers
Publication date: 13 January 2025
Copyright license: Creative Commons Attribution 4.0 International
Data used for figures in "Thickness dependence of the mechanical properties of piezoelectric high-Q_m nanomechanical resonators made from aluminium nitride" Anastasiia Ciers et.al Materials for Quantum Technology4, 046301 (2024);arXiv:2410.03944[cond-mat.mes-hall] (2024)
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