On/off-state design of semiconductor doping profiles (Q1011867)
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scientific article; zbMATH DE number 5542963
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | On/off-state design of semiconductor doping profiles |
scientific article; zbMATH DE number 5542963 |
Statements
On/off-state design of semiconductor doping profiles (English)
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14 April 2009
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semiconductor design
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drift-diffusion model
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Gummel iteration
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optimal control
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multi-objective
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dopant profiling
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0.8635819
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0.8450934
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0.83052194
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0.8274995
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0.8182956
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0.8053368
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