A three-scale FE approach to reliability analysis of MEMS sensors subject to impacts (Q1027930)
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scientific article; zbMATH DE number 5571721
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A three-scale FE approach to reliability analysis of MEMS sensors subject to impacts |
scientific article; zbMATH DE number 5571721 |
Statements
A three-scale FE approach to reliability analysis of MEMS sensors subject to impacts (English)
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30 June 2009
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drop impacts
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shocks
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polysilicon MEMS sensors
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multi-scale FE analysis
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micro-mechanics
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