Design of a control system for a macro-micro dual-drive high acceleration high precision positioning stage for IC packaging (Q1045439)
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scientific article; zbMATH DE number 5648340
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Design of a control system for a macro-micro dual-drive high acceleration high precision positioning stage for IC packaging |
scientific article; zbMATH DE number 5648340 |
Statements
Design of a control system for a macro-micro dual-drive high acceleration high precision positioning stage for IC packaging (English)
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15 December 2009
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macro-micro dual-drive
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positioning stage
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control system
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friction
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LQG
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