Theory of nonequilibrium inductive high-frequency discharge in a gas flow (Q1183898)

The global nonequilibrium flow in the discharge chamber of an induction plasma generator is modeled. On the basis of a numerical solution of the combined system of Navier-Stokes, Maxwell, energy, ionization kinetics and electron-gas energy balance equations, the structure of the nonequilibrium discharge is analyzed and the results obtained within the framework of the local one-dimensional approach and on the basis of global numerical modeling of the flow are compared. In finding the electromagnetic field distribution in the discharge chamber the boundary- value problem for the two-dimensional Maxwell equations is solved.