Algorithm study for VLSI interconnections (Q1267209)

A finite element method for capacitance calculation of VLSI interconnections is investigated. The proposed method incorporates geometry independent measured equation of invariance which was earlier proposed for mesh truncation. In order to speed-up the solution calculation, the wave-front technique is modified to solve finite element equation incorporating substructure concept. The numerical experiments presented in the last part of the article demonstrate the feasibility of the proposed method for VLSI interconnect.