Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis (Q1415684)
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scientific article; zbMATH DE number 2015020
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis |
scientific article; zbMATH DE number 2015020 |
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Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis (English)
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9 December 2003
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nonlinear modal analysis
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micro switch
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clamped-clamped micro beams
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