The probability scheme of constructing the mathematical model of shadowed sputtering (Q1581139)
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scientific article; zbMATH DE number 1508278
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | The probability scheme of constructing the mathematical model of shadowed sputtering |
scientific article; zbMATH DE number 1508278 |
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The probability scheme of constructing the mathematical model of shadowed sputtering (English)
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14 March 2004
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shadowing mask
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mask function
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layer function
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sputtering installation
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