Dynamical characteristics of an electrically actuated microbeam under the effects of squeeze-film and thermoelastic damping (Q1621786)
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scientific article; zbMATH DE number 6976140
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Dynamical characteristics of an electrically actuated microbeam under the effects of squeeze-film and thermoelastic damping |
scientific article; zbMATH DE number 6976140 |
Statements
Dynamical characteristics of an electrically actuated microbeam under the effects of squeeze-film and thermoelastic damping (English)
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12 November 2018
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mems
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microbeams
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squeeze-film damping
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thermoelastic damping
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multiphysics
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0.90304947
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0.8943666
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0.8908533
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0.89049697
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0.88597715
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0.88330686
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0.8806897
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