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Neural network structures for optimal control of LPCVD reactors. - MaRDI portal

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Neural network structures for optimal control of LPCVD reactors. (Q1862958)

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scientific article; zbMATH DE number 1885881
Language Label Description Also known as
English
Neural network structures for optimal control of LPCVD reactors.
scientific article; zbMATH DE number 1885881

    Statements

    title
    Neural network structures for optimal control of LPCVD reactors. (English)
    0 references
    author
    Yanyan Li
    0 references
    publication date
    22 September 2003
    0 references
    zbMATH Keywords
    film thickness control
    0 references
    hybrid networks modelling
    0 references
    inverse modelling
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    LPCVD reactor
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    Identifiers

    zbMATH DE Number
    1885881
    0 references
    OpenAlex ID
    W2016953639
    0 references
    DOI
    10.1007/S005210070010
    0 references
     
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