Strict and approximate models of a scratch on the basis of the method of integral equations (Q1874786)
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scientific article; zbMATH DE number 1915953
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Strict and approximate models of a scratch on the basis of the method of integral equations |
scientific article; zbMATH DE number 1915953 |
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Strict and approximate models of a scratch on the basis of the method of integral equations (English)
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25 May 2003
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Wafer surface purity testing using an optical scanner containing a laser beam is considered. An analysis of laser light scattering by a shallow scratch on the wafer surface is studied. The mathematical model of laser light scattering by a scratch is based on the method of volume integral equations. A numerical solution is obtained by Galerkin method or Born approximation. The results by Born approximation are compared with those by volume integral equations and by the method of discrete sources.
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integral transform
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physical optics
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scattering
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laser
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0.6869677901268005
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