A level set approach to a unified model for etching, deposition, and lithography. I: Algorithms and two-dimensional simulations (Q1902653)
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scientific article; zbMATH DE number 819435
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A level set approach to a unified model for etching, deposition, and lithography. I: Algorithms and two-dimensional simulations |
scientific article; zbMATH DE number 819435 |
Statements
A level set approach to a unified model for etching, deposition, and lithography. I: Algorithms and two-dimensional simulations (English)
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7 January 1996
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A model of a surface advancement in two-dimensional topography simulation is considered. It consists of a Hamilton-Jacoby type equation as a level set equation of motion, appropriate conditions and speed functions. Many numerical tests are presented.
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etching
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lithography
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numerical examples
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surface advancement
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topography simulation
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Hamilton-Jacoby type equation
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level set equation of motion
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