Stress evolution to steady state in ion bombardment of silicon (Q1939762)
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scientific article; zbMATH DE number 6141277
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Stress evolution to steady state in ion bombardment of silicon |
scientific article; zbMATH DE number 6141277 |
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Stress evolution to steady state in ion bombardment of silicon (English)
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5 March 2013
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stress evolution
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ion bombardment
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atomistic stress
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