A microsystem for the fracture characterization of polysilicon at the micro-scale (Q1949073)

From MaRDI portal





scientific article; zbMATH DE number 6157634
Language Label Description Also known as
English
A microsystem for the fracture characterization of polysilicon at the micro-scale
scientific article; zbMATH DE number 6157634

    Statements

    A microsystem for the fracture characterization of polysilicon at the micro-scale (English)
    0 references
    0 references
    0 references
    0 references
    0 references
    0 references
    0 references
    25 April 2013
    0 references
    microsystem
    0 references
    polysilicon fracture
    0 references
    mechanical testing
    0 references
    cohesive crack simulation
    0 references

    Identifiers