A model of wafer bonding by elastic accommodation (Q1973600)
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scientific article; zbMATH DE number 1441011
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A model of wafer bonding by elastic accommodation |
scientific article; zbMATH DE number 1441011 |
Statements
A model of wafer bonding by elastic accommodation (English)
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28 August 2003
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water bonding
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surface energy
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energy method
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elastic accommodation
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distortion
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