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Inverse problem of Mueller polarimetry for metrological applications - MaRDI portal

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Inverse problem of Mueller polarimetry for metrological applications (Q2232097)

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scientific article
Language Label Description Also known as
English
Inverse problem of Mueller polarimetry for metrological applications
scientific article

    Statements

    title
    Inverse problem of Mueller polarimetry for metrological applications (English)
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    author
    Tatiana Novikova
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    Pavel Bulkin
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    publication date
    4 October 2021
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    zbMATH Keywords
    Mueller polarimetry
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    optical metrology
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    critical dimensions
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    rigorous coupled wave analysis
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    cites work
    Q5289009
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    Identifiers

    Mathematics Subject Classification ID
    78A46
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    78A45
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    78A40
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    78M50
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    65K10
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    35Q60
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    zbMATH DE Number
    7405828
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    OpenAlex ID
    W3136855855
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