On the sensitivity of bifurcation-based electrostatic MEMS sensors: cantilever with tip plate (Q2234591)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | On the sensitivity of bifurcation-based electrostatic MEMS sensors: cantilever with tip plate |
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On the sensitivity of bifurcation-based electrostatic MEMS sensors: cantilever with tip plate (English)
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19 October 2021
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frequency-response equation
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added mass effect
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beam stiffness
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dynamic bifurcation
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