Combining lithography and directed self assembly for the manufacturing of vias: connections to graph coloring problems, integer programming formulations, and numerical experiments (Q2273901)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Combining lithography and directed self assembly for the manufacturing of vias: connections to graph coloring problems, integer programming formulations, and numerical experiments |
scientific article |
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Combining lithography and directed self assembly for the manufacturing of vias: connections to graph coloring problems, integer programming formulations, and numerical experiments (English)
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18 September 2019
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integrated circuit manufacturing
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DSA
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lithography
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integer programming
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graph coloring
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