Size-dependent dynamic pull-in analysis of beam-type MEMS under mechanical shock based on the modified couple stress theory (Q2337224)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Size-dependent dynamic pull-in analysis of beam-type MEMS under mechanical shock based on the modified couple stress theory |
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Size-dependent dynamic pull-in analysis of beam-type MEMS under mechanical shock based on the modified couple stress theory (English)
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19 November 2019
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MEMS
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mechanical shock
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electrostatic actuation
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modified couple stress theory
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