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A multi-scale simulation of tungsten film delamination from silicon substrate - MaRDI portal

A multi-scale simulation of tungsten film delamination from silicon substrate (Q2385899)

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A multi-scale simulation of tungsten film delamination from silicon substrate
scientific article

    Statements

    title
    A multi-scale simulation of tungsten film delamination from silicon substrate (English)
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    author
    Zhen Chen
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    Lu-Ming Shen
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    publication date
    15 October 2007
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    zbMATH Keywords
    Multi-scale simulation
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    film delamination
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    molecular dynamics
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    size effect
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    Identifiers

    Mathematics Subject Classification ID
    74R99
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    74K35
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    74S05
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    zbMATH DE Number
    5201079
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    OpenAlex ID
    W2094333573
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