Modeling MEMS resonators with rod-like components accounting for anisotropy, temperature, and strain dependencies (Q2385971)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Modeling MEMS resonators with rod-like components accounting for anisotropy, temperature, and strain dependencies |
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Modeling MEMS resonators with rod-like components accounting for anisotropy, temperature, and strain dependencies (English)
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16 October 2007
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MEMS
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cosserat rod
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strain gauge
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silicon
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