Thermoelastic vibration analysis of MEMS/NEMS plate resonators with voids (Q2392192)
From MaRDI portal
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Thermoelastic vibration analysis of MEMS/NEMS plate resonators with voids |
scientific article |
Statements
Thermoelastic vibration analysis of MEMS/NEMS plate resonators with voids (English)
0 references
1 August 2013
0 references
microelectronics mechanical systems (MEMS)
0 references
nanoelectronics mechanical systems (NEMS)
0 references
exact solutions for the free vibrations of plates
0 references
