Effect of geometry on the performance of MEMS aluminum nitride trampoline resonators in longitudinal resonance (Q2450305)
From MaRDI portal
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Effect of geometry on the performance of MEMS aluminum nitride trampoline resonators in longitudinal resonance |
scientific article |
Statements
Effect of geometry on the performance of MEMS aluminum nitride trampoline resonators in longitudinal resonance (English)
0 references
20 May 2014
0 references
0 references
