An analysis of the membrane deflection experiment used in the investigation of mechanical properties of freestanding submicron thin films (Q2459883)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | An analysis of the membrane deflection experiment used in the investigation of mechanical properties of freestanding submicron thin films |
scientific article |
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An analysis of the membrane deflection experiment used in the investigation of mechanical properties of freestanding submicron thin films (English)
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8 November 2007
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Thin films
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MEMS materials
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fracture
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plasticity
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nanoscale testing
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