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Application of optical proximity correction technology - MaRDI portal

Application of optical proximity correction technology (Q2481784)

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Application of optical proximity correction technology
scientific article

    Statements

    title
    Application of optical proximity correction technology (English)
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    author
    Yici Cai
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    Qiang Zhou
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    Rui Shi
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    Yang Wang
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    Xianlong Hong
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    publication date
    15 April 2008
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    zbMATH Keywords
    optical proximity effects (OPC)
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    rules-based
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    model-based
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    layout
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    IC
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    Identifiers

    zbMATH DE Number
    5264039
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    OpenAlex ID
    W1983967258
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