Stochastic models for pad structure and pad conditioning used in chemical-mechanical polishing (Q2498470)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Stochastic models for pad structure and pad conditioning used in chemical-mechanical polishing |
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Stochastic models for pad structure and pad conditioning used in chemical-mechanical polishing (English)
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16 August 2006
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surface roughness
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random closed sets
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Boolean model
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