Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon (Q254154)
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scientific article; zbMATH DE number 6551669
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon |
scientific article; zbMATH DE number 6551669 |
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Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon (English)
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8 March 2016
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