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A continuum-based modeling of MEMS devices for estimating their resonant frequencies - MaRDI portal

A continuum-based modeling of MEMS devices for estimating their resonant frequencies (Q2638133)

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A continuum-based modeling of MEMS devices for estimating their resonant frequencies
scientific article

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    title
    A continuum-based modeling of MEMS devices for estimating their resonant frequencies (English)
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    author
    Yanyan Li
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    publication date
    14 September 2010
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    zbMATH DE Number
    5785259
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    zbMATH Keywords
    electric stiffness
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    mesh motion
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    electric field
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    finite element method
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    total Lagrangian
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    OpenAlex ID
    W2068235105
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