Investigation of nonlinear squeeze-film damping involving rarefied gas effect in micro-electro-mechanical systems (Q2671788)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Investigation of nonlinear squeeze-film damping involving rarefied gas effect in micro-electro-mechanical systems |
scientific article |
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Investigation of nonlinear squeeze-film damping involving rarefied gas effect in micro-electro-mechanical systems (English)
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3 June 2022
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squeeze-film damping
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discrete unified gas kinetic scheme
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rarefied gas flow
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micro-electro-mechanical systems
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