Numerical modelling of the plasma source ion implantation process in 2D. (Q2738647)
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scientific article; zbMATH DE number 1639784
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Numerical modelling of the plasma source ion implantation process in 2D. |
scientific article; zbMATH DE number 1639784 |
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1998
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Numerical modelling of the plasma source ion implantation process in 2D. (English)
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