Optimization of wafer exposure patterns using a two-dimensional cutting algorithm (Q2767738)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: Optimization of wafer exposure patterns using a two-dimensional cutting algorithm |
scientific article; zbMATH DE number 1698474
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Optimization of wafer exposure patterns using a two-dimensional cutting algorithm |
scientific article; zbMATH DE number 1698474 |
Statements
14 January 2003
0 references
Optimization of wafer exposure patterns using a two-dimensional cutting algorithm (English)
0 references
