Mathematical modeling of electrostatic MEMS with tailored dielectric properties (Q2783738)
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scientific article; zbMATH DE number 1730714
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Mathematical modeling of electrostatic MEMS with tailored dielectric properties |
scientific article; zbMATH DE number 1730714 |
Statements
17 April 2002
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MEMS
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microelectromechanical system
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exact shooting
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semilinear elliptic problem
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0.9165368
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0.8915323
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0.8912107
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0.8821138
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0.8802909
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Mathematical modeling of electrostatic MEMS with tailored dielectric properties (English)
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