Multiscale simulation of nonlinear processes in technical microsystems (Q2788906)

Different approaches are used for an investigation of nonlinear gas dynamical processes on macro- micro- and nano-scale levels. An approach combining numerical calculations of gas dynamical equations on the macro level, and a molecular modeling on the micro and nano levels is proposed. Splitting the algorithm on physical processes and scales, grid methods and methods of molecular dynamics characterize this approach. Parameters of supersonic flows of a binary gas mixture in the supersonic cold gas sputtering device are found.