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Lateral-flexural and torsional vibrations of flexible ring for electromechanical integrated electrostatic harmonic actuator - MaRDI portal

Lateral-flexural and torsional vibrations of flexible ring for electromechanical integrated electrostatic harmonic actuator (Q2845988)

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scientific article; zbMATH DE number 6205648
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English
Lateral-flexural and torsional vibrations of flexible ring for electromechanical integrated electrostatic harmonic actuator
scientific article; zbMATH DE number 6205648

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    5 September 2013
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    electromechanical integrated
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    actuator
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    vibration
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    MEMS
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    Lateral-flexural and torsional vibrations of flexible ring for electromechanical integrated electrostatic harmonic actuator (English)
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