On the control design and robustness analysis for high-density microcantilever arrays (Q2846333)
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scientific article; zbMATH DE number 6205904
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | On the control design and robustness analysis for high-density microcantilever arrays |
scientific article; zbMATH DE number 6205904 |
Statements
On the control design and robustness analysis for high-density microcantilever arrays (English)
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5 September 2013
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AFM
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distributed control
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array architecture
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atomic force microscope
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nano
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