Analysis of an inverse problem arising in photolithography (Q2884806)
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scientific article; zbMATH DE number 6036489
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Analysis of an inverse problem arising in photolithography |
scientific article; zbMATH DE number 6036489 |
Statements
18 May 2012
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photolithograpy
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shape optimization
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sets of finite perimeter
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\(\Gamma \)-convergence
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Analysis of an inverse problem arising in photolithography (English)
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