On self-organization processes of nanostructures on semiconductor surface by ion bombardment (Q2925052)
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scientific article; zbMATH DE number 6359074
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | On self-organization processes of nanostructures on semiconductor surface by ion bombardment |
scientific article; zbMATH DE number 6359074 |
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20 October 2014
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motion of charged particles
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ionized gas flow in electromagnetic fields
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plasmic flow
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semiconductors
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dissipation
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nanostrucures and nanoparticles
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0.85868907
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0.84375787
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0.8137154
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On self-organization processes of nanostructures on semiconductor surface by ion bombardment (English)
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The process of nanostructures formation on surfaces of semiconducting substrates is considered. The effect of the high-order terms on the evolution of the surface morphology is investigated and the defects arising in the process of structures formation are classified.
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