Study and simulation of the sputtering process of material layers in plasma (Q293514)
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scientific article; zbMATH DE number 6590825
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Study and simulation of the sputtering process of material layers in plasma |
scientific article; zbMATH DE number 6590825 |
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Study and simulation of the sputtering process of material layers in plasma (English)
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9 June 2016
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Monte Carlo simulations
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angular distribution
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sputtering yield
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energy distribution
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sputtering process
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