Simulation of RF plasma flowing at low pressure (Q2961173)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Simulation of RF plasma flowing at low pressure |
scientific article |
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Simulation of RF plasma flowing at low pressure (English)
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17 February 2017
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mathematical modeling
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RF plasma
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low pressure
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jet streams
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transient mode
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Monte-Carlo method
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statistical modeling
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