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Discrete Relaxation Method for Triple Patterning Lithography Layout Decomposition - MaRDI portal

Discrete Relaxation Method for Triple Patterning Lithography Layout Decomposition (Q2989515)

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Discrete Relaxation Method for Triple Patterning Lithography Layout Decomposition
scientific article

    Statements

    title
    Discrete Relaxation Method for Triple Patterning Lithography Layout Decomposition (English)
    0 references
    author
    Xing-Quan Li
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    Ziran Zhu
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    Wen-Xing Zhu
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    publication date
    8 June 2017
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    Identifiers

    zbMATH DE Number
    6727955
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