Comparison of pull‐in voltages in MEMS using 3D FEM and analytical approaches (Q3019324)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Comparison of pull‐in voltages in MEMS using 3D FEM and analytical approaches |
scientific article |
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Comparison of pull‐in voltages in MEMS using 3D FEM and analytical approaches (English)
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28 July 2011
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electromechanical devices
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finite element analysis
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MEMS
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voltage
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