Modeling of mask diffraction and projection imaging for advanced optical and EUV lithography (Q3019693)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Modeling of mask diffraction and projection imaging for advanced optical and EUV lithography |
scientific article |
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Modeling of mask diffraction and projection imaging for advanced optical and EUV lithography (English)
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28 July 2011
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image modeling
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lithography simulation
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rigorous diffraction modeling
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mask topography
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