Identification of influence factors in a thermal model of a plasma-assisted chemical vapor deposition process (Q3062531)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Identification of influence factors in a thermal model of a plasma-assisted chemical vapor deposition process |
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Identification of influence factors in a thermal model of a plasma-assisted chemical vapor deposition process (English)
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28 December 2010
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inverse problem
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numerical design of experiments
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partial differential equations
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sensitivity analysis
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thin film elaboration
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