A conformal mapping-based approach for fast two-dimensional FEM electrostatic analysis of MEMS devices (Q3082627)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A conformal mapping-based approach for fast two-dimensional FEM electrostatic analysis of MEMS devices |
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A conformal mapping-based approach for fast two-dimensional FEM electrostatic analysis of MEMS devices (English)
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16 March 2011
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MEMS
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FEM
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electrostatically actuated
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conformal mapping
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