Effect of residual stresses on wave propagation in adhesively bonded multilayered MEMS structures (Q3112849)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Effect of residual stresses on wave propagation in adhesively bonded multilayered MEMS structures |
scientific article |
Statements
6 February 2012
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microelectromechanical systems
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multilayered structure
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three-dimensional linearized elasticity theory
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initial stresses
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longitudinal wave
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transverse wave
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wave velocity
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Effect of residual stresses on wave propagation in adhesively bonded multilayered MEMS structures (English)
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