Minimising idle times in cluster tools in the semiconductor industry (Q3163143)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Minimising idle times in cluster tools in the semiconductor industry |
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Minimising idle times in cluster tools in the semiconductor industry (English)
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25 October 2010
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cluster tool
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robotic cell
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bottleneck
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idle time
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waiting time
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sequencing
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