Studying thin film damping in a micro-beam resonator based on non-classical theories (Q332867)
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scientific article; zbMATH DE number 6649713
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Studying thin film damping in a micro-beam resonator based on non-classical theories |
scientific article; zbMATH DE number 6649713 |
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Studying thin film damping in a micro-beam resonator based on non-classical theories (English)
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9 November 2016
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thin film damping
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micro-electromechanical systems (MEMS)
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micro-polar theory
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